•Soft X-ray resonant scatterometer(REXS): Specifications refer to the table below. The scatterometer has the characteristics of 6-axis freedom of the sample and 3-axis freedom of the detector, co-frame mounting of three detectors: PD/CCD/electron channeltron, isolation from cavity vibration, and the cool capacity down around 10K.
| Energy Range | 150 ~ 1500 eV |
| Photon Flux @244eV | 3×1012phs/s |
| Beam Spotsize(H×V) /Divergence | 400×20 μm2 /2mrad |
| Q range | 0.025-8.6nm-1 |
| Vacuum range | <10-9mbar |
•Sample loading vacuum interconnection (load lock, sample pre-treatment chamber)
Figure 5. REXS scatterometer (quantum crystal) and sample loading and pre-treatment vacuum interconnecting system
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