•Soft X-ray fluorescence spectrometer (RXES spectrometer): Refer to the table below for specifications
Figure 3. Soft X-ray fluorescence spectrometer (RXES spectrometer)
| Specifications | As measured |
| Energy Range(eV) | 150～1500 |
| Energy Resolution | 58meV@450eV |
| Beam spotsize (H×V μm2） | 23×8 |
•Sample loading system (load lock, glove box, vacuum interconnection):
Figure 4. Sample loading system (glove box in the foreground)
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