Soft X-ray resonant scatterometer(RoSXS): specifications refer to the table below. This scatterometer has the characteristics of fast entry access door, sample arrays, large q range (sub-micron to 1nm scale), transmission/reflection mode, and in-situ heating and stretching etc.
Figure 6. RoSXS scatterometer (organic films/polymers) exterior(left) and internal view (right)
| Energy Range | 150 ~ 1500 eV |
| Photon Flux@244eV | 3×1012phs/s |
| Beam Spotsize(H×V) /Divergence | 1500×250 μm2/2mrad |
| Q range (carbon edge) | 0.005-1.9nm-1 |
| Vacuum | 10-6mbar |
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