| Energy Range | 130~1500eV |
| Energy Resolution（ΔE/E） | 2×10-4 @244eV |
| Beam Spot Size（H×V）@RXES | 90×10 (µm2) |
| Photon flux（phs/s/0.1%BW） | >1×1012 @ 244eV |
| Energy Resolution of RXES Emission Spectrograph | <0.09eV @ 445eV |
| Angular Resolution of REXS Scatterometer | <0.01° |
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