Main Chamber Rotation Range | ±15° |
Sample Rotation Range | ±15° |
Spot size at sample | 200nm *200nm |
Energy Resolution of the Spectrometer | ≤ 10meV@91eV |
附件下载:
Main Chamber Rotation Range | ±15° |
Sample Rotation Range | ±15° |
Spot size at sample | 200nm *200nm |
Energy Resolution of the Spectrometer | ≤ 10meV@91eV |
附件下载: