BL20U2

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Main equipment of the emission spectra station
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•Soft X-ray fluorescence spectrometer (RXES spectrometer): Refer to the table below for specifications
Figure 3. Soft X-ray fluorescence spectrometer (RXES spectrometer)
 Specifications  As measured
 Energy Range(eV)  150～1500
 Energy Resolution  58meV@450eV
 Beam spotsize (H×V μm2）  23×8
•Sample loading system (load lock, glove box, vacuum interconnection): 
Figure 4. Sample loading system (glove box in the foreground)
Main equipment of elastic scattering station (dedicated to quantum crystals)
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•Soft X-ray resonant scatterometer(REXS): Specifications refer to the table below. The scatterometer has the characteristics of 6-axis freedom of the sample and 3-axis freedom of the detector, co-frame mounting of three detectors: PD/CCD/electron channeltron, isolation from cavity vibration, and the cool capacity down around 10K.
Energy Range  150 ~ 1500 eV 
Photon Flux @244eV  3×1012phs/s 
Beam Spotsize(H×V) /Divergence  400×20 μm2 /2mrad 
Q range  0.025-8.6nm-1 
Vacuum range  <10-9mbar 

•Sample loading vacuum interconnection (load lock, sample pre-treatment chamber)
Figure 5. REXS scatterometer (quantum crystal) and sample loading and pre-treatment vacuum interconnecting system 
Main equipment of the elastic scattering station (dedicated to organic thin films/polymers )
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Soft X-ray resonant scatterometer(RoSXS): specifications refer to the table below. This scatterometer has the characteristics of fast entry access door, sample arrays, large q range (sub-micron to 1nm scale), transmission/reflection mode, and in-situ heating and stretching etc.
Figure 6. RoSXS scatterometer (organic films/polymers) exterior(left) and internal view (right)
 Energy Range 150 ~ 1500 eV 
 Photon Flux@244eV 3×1012phs/s
 Beam Spotsize(H×V) /Divergence 1500×250 μm2/2mrad 
 Q range (carbon edge) 0.005-1.9nm-1 
 Vacuum 10-6mbar