 |  |
| CMOS detector system | Fluorescent detector systems |
 |  |
| Pilatus detector | Ion chamber system |
 |  |
| Merlin detector and Diffractometer Systems | Vacuum chamber |
 |  |
| 10nm KB mirror and sample stage | phase-compensating mirror |
 |  |
| 50nm KB mirror and sample stage | Automatic sample change robot |
 |  |
| SEM | Microscopy |
