X-ray Wavefront Metrology (XWM) is an at-wavelength and in situ method that permits the characterization of wavefront and optical elements with high angle sensitivity on the order of 10 nrad. It allows test of complex optical systems in real conditions, such as ultra high vacuum environment, thermal radiation, mechanical clamping, and vibration. It has been applied for optics metrology and wavefront sensing in reflective mirrors, refractive x-ray lens, and diffractive optics.
Fig7. Slope errors of the reflective mirrors
Fig8. Wavefront of the CRL
附件下载：