Detectors:
(A) Photomultiplier tube (PMT): used for STXM imaging signal measurement and monitoring of upstream incident light intensity; its probe aperture is about 2 mm.
(B)Photodiode (PD): used for dimming and calibrating light path components; its target plane size is 2cm × 2cm.
(C) Visible light microscope (VLM): for the optical path calibration and sample positioning.
(D) X-ray scientific CMOS camera (sCMOS): for ptychography, photon correlation spectroscopy, and soft X-ray resonant scattering data acquisition; the detector pixel array is 2048×2048, pixel size is 11um, frame rate is 24Hz.
(E) Silicon drift detector (SDD): for fluorescence yield absorption spectroscopy and future fluorescence imaging.
Sample stages:
(A) 3-dimensional piezoelectric ceramic scanning stage: for fine scanning imaging of samples with a minimum step size of 1 nm and a stroke of 100um × 100um × 100um.
(B) 2-dimensional high-precision stepping scanning stage: for coarse scanning imaging of samples and switching between different samples, with a motion accuracy of 1um and a travel of 8cm×4cm.
(C) High-precision rotary stage: used for angular rotation during CT imaging with an accuracy of 0.01 degree.
Focusing system:
(A) Fresnel zone plate and its 3D motion stage: used for nano-focusing of X-rays with a diameter of 300 um, an outermost zone width of 30nm, and a central stop diameter of 80 um.
(B) Order-selective aperture and its 3D motion stage: used to block the high-order diffracted light and direct beam when the ZP is focusing; it is made of Pt-Ir alloy with an inner diameter of 70 um and an outer diameter of 3 mm.
