| Photon energy range | 200 - 2000 eV |
| Energy resolution (E/E) | > 17000 @244eV |
| 4200 @867eV | |
| Minimum spot size | 30 nm |
| Photon flux | 1.5×108phs/s@410eV |
附件下载：
| Photon energy range | 200 - 2000 eV |
| Energy resolution (E/E) | > 17000 @244eV |
| 4200 @867eV | |
| Minimum spot size | 30 nm |
| Photon flux | 1.5×108phs/s@410eV |
附件下载：