| Main Chamber Rotation Range | ±15° |
| Sample Rotation Range | ±15° |
| Spot size at sample | 200nm *200nm |
| Energy Resolution of the Spectrometer | ≤ 10meV@91eV |
附件下载:
| Main Chamber Rotation Range | ±15° |
| Sample Rotation Range | ±15° |
| Spot size at sample | 200nm *200nm |
| Energy Resolution of the Spectrometer | ≤ 10meV@91eV |
附件下载: