Parameters

SBP line

SUD line

Photon energy range

200-620 eV

90-410 eV

Repetition rate

1-50 Hz

1-50 Hz

Pulse energy

~100 μJ

~50 μJ

Spectralbandwidth (FWHM)

~600 meV

~500 meV

Focused spot size

~3 μm

~10 μm

Polarization

Horizontal

Horizontal/Vertical/Circular

Pulse duration

50-300 fs

50-300 fs